Home SPT


About SPT
Sales & Support
Contact Us

SPP Technologies Co., Ltd.
Sumitomo Precision Products

SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.


Home SPT




Next generation vertical batch furnaces

SPT's thermal processing equipment delivers proven process results and high productivity.

How do we imagine technology that fits your future?

At SPT we’re built on a 50 year foundation of leading oxidation diffusion, LPCVD, and APCVD technologies. We work with you to customize cutting-edge thermal products that accelerate your success.

Explore Technologies

Dynamic product innovations

Vertical furnaces on the Ace platform are developed based on customer feedback and strong expertise of our thermal products development team. Our new AVP Ace uses the same process chamber as previous models for 150-200mm wafers for superior process performance and consistency.

Meet the AVP Ace

Relationships with real people. Results in real time.

Our employees are invested in your successful operation and ownership for the entire lifecycle of our products. Our worldwide team of support specialists and engineers are an extension of your team. We provide expert training, installation, and service to maximize tool uptime and your SPT experience.

Get to know SPT

Learn more about SPT's product portfolio

We look forward to connecting to learn more about your wafer processing needs. Our experienced representatives will partner with you to provide solutions tailored to your application needs.

A culture of continuous improvement

ISO certification isn’t just a another certification to us. As a company, we’re committed to improving our own processes to better serve our customers through enhanced service and technology. Attention to these processes goes hand-in-hand with our environmental sustainability practices.