Log In
Log In

WJ-APCVD

WJ-APCVD

About SPT
Technology
Sales & Support
News
Contact Us

Login

SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.

https://www.sptmicro.com/

WJ-APCVD

H3

H4

H5
H6
wjapcvd-600x800

WJ-APCVD Product Line

SPT offers continued support, spares, and upgrades for Atmospheric Pressure CVD of SiH4 or TEOS based dielectrics. Our patented Watkins Johnson (WJ) linear injector technology enables precise, repeatable deposition of doped or un-doped films with no transient film properties and uniform gap fill across the wafer.

Request info

Watkins Johnson (WJ) Atmospheric Pressure CVDs with self-cleaning, heated conveyor processing

Our legacy wafer transport system via a self-cleaning belt conveyor for excellent system reliability and lowest cost of ownership for dielectric gap-fill.

Microelectronics,Engineer,Works,In,A,Modern,Scientific,Laboratory,On,Computing

Spares and Upgrades

Factory-certified spares and upgrades are available for the following platforms:

  • WJ-999 – 3 process chambers for TEOS and hydride processes
  • WJ-1000 – 4 process chambers for TEOS and hydride processes
  • WJ-1500 – 4 chambers for TEOS processes only
Contact Sales
Microelectronics,Engineer,Works,In,A,Modern,Scientific,Laboratory,On,Computing