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WJ-APCVD

WJ-APCVD

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SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.

https://www.sptmicro.com/

WJ-APCVD

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WJ-APCVD Product Line

SPT offers continued support for Atmospheric Pressure CVD of SiH4 or TEOS based dielectrics. Our patented Watkins Johnson (WJ) linear injector technology enables precise, repeatable deposition of doped or un-doped films with no transient film properties and uniform gap fill across the wafer.

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Watkins Johnson (WJ) Atmospheric Pressure CVDs with self-cleaning, heated conveyor processing

Wafer transport is via a self-cleaning belt conveyor enabling excellent system reliability with the lowest cost of ownership for dielectric gap-fill.

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Platform options

Factory-certified re-manufactured systems are available with the following platform options:

  • WJ-999 – 3 process chambers for TEOS and hydride processes
  • WJ-1000 – 4 process chambers for TEOS and hydride processes
  • WJ-1500 – 4 chambers for TEOS processes only
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