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Remanufactured

Remanufactured

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SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.

https://www.sptmicro.com/

Remanufactured

H3

H4

H5
H6
remanufactured-wj-600x800

Remanufactured AVP, RVP, APCVD systems

We offer the same custom approach to remanufactured and refurbished systems, which provide many of the same benefits as new equipment including: the option for current parts and upgrades; customer-specified configuration; final test and source inspection; and warranty.

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Remanufactured and refurbished systems

In addition to new systems, when available, SPT offers factory-certified remanufactured and refurbished equipment as well as parts and equipment and support.

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Applications

  • Wet/dry thermal oxide
  • Radical oxidation
  • Stoichiometric and stress controlled SiN TEOS, SiH4 and DCS-based SiO2
  • Doped and un-doped polysilicon
  • 100 to >1200°C anneals
  • ONO and ALD Al2O3
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