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AVP/RVP

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SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.

https://www.sptmicro.com/

AVP/RVP

H3

H4

H5

H6

avp-rvp-avp-8200-600x800

AVP/RVP

Features:

Advanced/Rapid Vertical Process
Small footprint enables side by side installation
Low Cost of Ownership
Single or Dual boat configuration
Up to 200 wafer batch
Remanufactured tools available (subject to donor availability)
Flexible substrate handling
150mm and or 200mm wafers
Perforated and thin/bowed wafers

AVP-8000, AVP-8200, RVP-9000, and RVP-9200 Vertical Processors for 150-200mm wafers

These previous versions of the AVP Ace are vertical batch furnaces with a flexible platform for diffusion, oxidation, and LPCVD processes.

Silicon,Wafers,With,Microchips,Used,In,Electronics,For,The,Fabrication

Applications

Wet/dry thermal oxide
Radical oxidation
Silicon Nitride (Stoichiometric and low stress)
TEOS, SiH4 and DCS-based SiO2
Doped (P, As, B) and un-doped polysilicon
Atomic Layer Deposition
Anneal and Cure : 100 to >1200°C

Silicon,Wafers,With,Microchips,Used,In,Electronics,For,The,Fabrication