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SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.

https://www.sptmicro.com/

Products

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SPT's vertical batch furnaces for thermal wafer processing

Customized equipment designed to meet your application, configuration, and substrate needs.

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AVP Ace

Newest release Advanced/Rapid Vertical Processor for 150mm and 200mm wafers

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RVP Ace

Newest release Rapid Vertical Processor for 200mm and 300mm wafers

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RVP-300

RVP-300plus and RVP-550 Rapid Vertical Processors for 200mm and 300mm wafers

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AVP/RVP

AVP-8000, AVP-8200, RVP-9000, and RVP-9200 Vertical Processors for 150-200mm wafers

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WJ-APCVD

Watkins Johnson (WJ) Atmospheric Pressure CVDs with self-cleaning, heated conveyor processing

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Remanufactured

Remanufactured thermal processing systems (as available), as well as parts and equipment and support.

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Consistency and commitment

For processing and facility continuity, we’ve designed our process chambers to transfer seamlessly from your legacy system to our Ace product line.

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