Sales & Support
SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.
Newest release Advanced/Rapid Vertical Processor for 150mm and 200mm wafers
Newest release Rapid Vertical Processor for 200mm and 300mm wafers
RVP-300plus and RVP-550 Rapid Vertical Processors for 200mm and 300mm wafers
AVP-8000, AVP-8200, RVP-9000, and RVP-9200 Vertical Processors for 150-200mm wafers
Watkins Johnson (WJ) Atmospheric Pressure CVDs with self-cleaning, heated conveyor processing
Remanufactured thermal processing systems (as available), as well as parts and equipment and support.
For processing and facility continuity, we’ve designed our process chambers to transfer seamlessly from your legacy system to our Ace product line.