Solutions

The rapidly-evolving device manufacturing industry requires agile processes and dependable systems.

Solutions

Solutions

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SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.

https://www.sptmicro.com/

Solutions

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Solutions for a changing landscape

Customers gain an advantage over the competition with our expertise in developing novel applications and maximizing system design.

Macro,Of,Silicon,Wafers.,Low,Dof

SPT offers a range of large batch vertical furnaces. We are able to offer both new and factory-certified, remanufactured systems as well as custom system conversions to meet specific engineering requirements. Our production-proven vertical furnaces deliver superior process results, high productivity, and the lowest cost of ownership (CoO).

Macro,Of,Silicon,Wafers.,Low,Dof
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Delivering production-proven processes

Our product portfolio includes a variety of vertical batch furnaces designed and customized to offer a diverse range of processes.