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SPT Microtechnologies USA, Inc. designs and manufactures batch vertical furnaces for semiconductor device manufacturers worldwide. We are a wholly owned subsidiary of SPP Technologies Co., Ltd. of Japan, a Sumitomo Precision Products company.

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SPP Technologies Co., Ltd.
Sumitomo Precision Products

SPT Microtechnologies USA, Inc. (SPT) is a leading vertical batch furnace supplier for innovative MEMS, Power, LED, Semiconductor, III-V, RFID, and packaging device manufacturers.

https://www.sptmicro.com/

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Equipping device manufacturers

Innovative and value-driven device manufacturers in Power, MEMS, LED, Semiconductor, Packaging, RFID, and III-V industries work with us to customize vertical furnace systems.

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Dynamic corporate history

Our current and legacy family of products represents our rich corporate history. SPT’s rich history dates back to Thermco and Watkins Johnson. Throughout the years and transitions, SPT has continued to offer quality furnaces and we value our relationships with loyal customers, suppliers, and longtime employees.

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Locations worldwide

We support our worldwide customer base through our headquarters in Silicon valley and subsidiary offices in Germany and Taiwan.

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Specialized process and substrate capabilities

Customers select SPT for superior process results and customized innovation. We partner with our customers to develop advanced thermal applications suited to their specific needs.

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Your partners in success

With over 60 years of leadership in batch furnaces and wafer processing equipment, SPT’s commitment to relationships and quality ensure an excellent customer experience. We are highly engaged in your success, from the first stages of design and throughout your equipment’s lifetime.

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New and remanufactured vertical batch furnaces

Our wide range of advanced vertical furnaces are developed to address our customers’ application-specific needs.